KSP 600-3X64【KUKA备件德星提供】

KUKA库卡驱动模块KSP 600-3X64

现货，提供故障维修，及售后保修服务。

销售维修电话：020-29131671

AE Advanced energy MDX-20K master 3152223-003Y power su





AE Advanced energy MDX-10K master 3152012-041AB power s





Advanced Energy LDM plasma RF generator 2026-000-D





Novellus 02-103960-00 Controller Platform P166/64




COMDEL CLX-1250 RF Generator 1.75-2.15 MHz





Novellus Match 02-282128-00,




LAM 853-015130-002-?P RF match,





Advanced energy 1101-001D Ion Beam power source for vee




2  VAT PM-5 Adaptive pressure controller LAM 796-093





Glass shroud for thermonics temperature cycling units,





AMAT 0190-00398 ASTeX ARX-X491-P 3Kw Microwave contro





Novellus 12-01163-00 Ceramic Ring





AMAT 0200-18021 Blade 6" & 8" Thin, Robot HDPCVD, Rev.





MikroPrecision Automation XY stage RS-O2-CFM125





Lintec 4TK10CGN-A Torque Motor, AC, 10W, 100V, 12uF





Comdel MatchPro CPMX-3000 Matching Network





5 MKS baratron 124A-11848, 2000 Torr Range, with calibr





5 AMAT 0021-36300 manifold, output DXZ chamber, repaire





Brooks automation 002-7391-26 Acculigner Wafer notch fi





AMAT 0190-00398 ASTeX ARX-X491-P 3Kw Microwave contro





5 Horiba stec MFC LF-410A, LF-410A-EVD, TEOS, 4.0 g/min






6 UNIT 1660 MFC, UFC-1660, O2, Ar, Cl2, BCl3, C2F6 diff





6 UNIT 1660 MFC, UFC-1660, CL2, N2, SF6, Ar, BCl3, C2HF




Novellus 02-103970-00 ASSY,MOD CONT,P166/64 controller





BOC EDWARDS QDP 40 vacuum pump with Silencer, untested




6 STEC MFC SEC-4400M, CL2, O2, SiF4,


6 STEC MFC SEC-4400M, NH3, CF4, CHF3,


5 Horiba Stec MFC Injection valve metal Seat UCV Inject





5 Stec MFC SEC-4400, O2, CO2, He, Ar, Cl2, different ga



Brooks Module Controller 002-5870-05, I/O Assembly 002-


ENI OEM-6 RF Generator, ENI OEM-6AM-1B-2125?1, 750 Watt


ENI OEM-650A RF Generator, ENI OEM-6A-11491-52?, 750 W


ENI LPG-6 pwer supply RF generator, output impedence LP


Affinity Chiller  FWA-032K-DD01CA?M1


Neslab Merlin 25 Recirculating chillier, working




3 Stec MFC SEC-4400MC, Ar 500 SCCM, with calibration sh




AMAT 0190-00398 AGL D13450 Microwave control module 3K




3  Stec SEC-4400 MFC, SEC-4400M, WF6 gas, 10 SCCM fl





TWO MKS Throttle valve controller 651D-15413





Novellus 02-105005-00 ASSY,MC,P166,W/?8 RS232 controller




2 MKS baratron 627BU2TBE1B---S?, 0.02 Torr





2 AMAT 0010-09341 CVD wafer lift assembly, AMAT 0010-10





ENI OEM-2-21091-5?1 RF Generator, 2500 W, 13.56 MHz,





CYBOR Module Controller 00506-05, 18 VDC 10.5 AMPS


AMAT 0010-09181 precision 5000 DC power supply +- 15V +


ENI LPG-6A RF Generator, Low Frequency


3 MKS baratron 124A-11848, 2000 TORR, with calibration





ENI OEM-12B-02 RF Generator, 1250W at 13.56 MHz,






ENI GHW-12Z Genesis RF Generator 1250W, AMAT 0190-09832




ENI RF GENERATOR OEM-12A XL, OEM-12AL-01





ENI RF GENERATOR OEM-12A Solid state power generator, O





ENI ACG-3 RF Power Generator





5 MFC, UNIT UFC-1660, N2, Cl2, He Unit MFC




Two AMAT 0020-37210 Loadlock Casset Holder


Novellus / Porter TDEAT Flow control assembly 020495640


307 vacuum gauge controller granville phillips, lots of



5 STEC MFC SEC-4400M C3F6, WF6, SiH4,


3 Takex Wide Sensors SS20-TR40, Input 12-24V DC, 150mA.


VARIAN assy 04-719317-04 RF Interface Controller


VARIAN assy 04-719311-03 Process Heater Interlock


Pfeiffer Balzers TPH 170 Turbo Pumps, PMP01210D619


MFC Mykrolis FC-2902MEP5-T, 5 SLPM, Gas N2  lot of 2


Alcatel ACT 600M Turbo pump controller


5 Unit MFC 1660, UFC-1660 N2 100 SCCM,Ar 400 SCCM,CHF3




5 Unit MFC, UFC-1660, (CH3O)3B, Ar, N2, C4F8, HBr, Diff





HAMAT-4 4 channel Ozone monitor gas box, IN USA inc.






4 MKS baratron 124A-11848, 2000 Torr Range, with calibr





5 Unit 1660 MFC UFC-1660 Cl2 200 sccm,BCl3 100 sccm,He





5 Unit 1660 MFC UFC-1660 C4F8 20 sccm, SF6 50 sccm,CF4





TWO Aera MFC FC-7820C, N2 100 SLM





ROLLER BRUSH CELL HDSIOC NOVELLUS 02-336512-00 REV. 1





HDSIOC ROLLER BRUSH NOVELLUS 02-308058-00 VERSION 4.72




XCEDA FAC HDSIOC NOVELLUS 02-309772-00 VERSION 4.72


ISOC HI-LO TRANSFER NOVELLUS 02-131736-00 REV. A


PDL OXIDE HDSIOC 3 NOVELLUS 02-273741-00 VERSION 4.72


ISIOC DAMA CLEAN BB-DFE DIGITAL DYNAMICS G19-10000-00


SIOC wts-vh sioc 1 NOVELLUS 02-123968-00 REV. 2


SEREN I1600 ICP Generator


AMAT 0041-05383 200mm Zone 5 Profiler Peek


vacuum chamber Flange, Cryo Turbo, Gate valve interface


VME MOTOROLA 2304-900





4 Horiba stec MFC LF-410A, LF-410A-EVD, TEOS, 3.0 g/min





4 Horiba stec MFC LF-410A, LF-410A-EVD, TEOS, 4.0 g/min




3 MKS baratron 127AA-00001E, 1 torr, sealed bag





10  Perlast 22-291392-00 Oring, 2-279, G67P, 329.80





Olympus CV-100 Evis Video System Endoscopy Processor vi





2 Leybold TurboTronik NT 340M, 340 M/I turbo pump contr





8  Tylan FC-261 N2, H2, O2





10 Brooks handler calibration wafer test, 200mm, semito





ENI RF Generator OEM-12A, 1250W at 13.56 MHz





MRC RF matching network A118144 For MRC Eclipse Star to





Advanced Energy PDX 900-2V RF generator 3156024-031B





MKS 65D2N Pressure controller, manual MKS 600




AMAT 0021-01602 Manifold, input water NI PL, TI - XZ





Brooks automation robot controller 129973 Series 8 cont





2 AMAT 0010-76175 throttle valve, dual spring, cluster,





Advanced energy 2026-000-D, ASM LDM PLASMA Generator





AMAT 0190-13407 AE PDX RF Generator 500W, 325-375 KHz





ASTEX applied science ABX-X355 0037 1873 SA, RF generat




NT intergrated flow controller 6500-xx-F03-D12?-K-P2-U2-





2 AMAT 0010-09180 CVD CHAMBER WAFER LIFT ASSEMBLY




3 MKS baratron 124A-11848, 2000 TORR, S 8263A




3 STEC LF-410A-EVD,1 TEB, 1.5 g/min and 2 TEOS 1.5 g/mi


3 STEC LF-310A-EVD,TEP?O, 0.25g/min liquid flow controll


STEC LF-410A-EVD,TEO?S, 1.5g/min liquid flow controller


3 STEC LF-310A-EVD, TEPO 0.25 g/min liquid flow control


4  Linear actuator 400MM rail two long NP105, 95086





4  AMAT 3700-02105 Chemraz SC513, 10.484 x .139






TEC ASM 000-71002700-00?, PCB, TEC 68356 D 45877





6  Fluorosilicone 19.33 x 1.39 Oring, Blue, 70, 22-3





PCB Board OPTO22 LC4 001836L 94V-0, OPTO 22 EX2 001840D





ETEC systems LENS control 756-4350-01, ASSYMBLY 756-435






MEI motion controller engineering inc PCB board A013-40




2 STEC AFC-202 MFC 202 N2 gas, 200 SLM range, repaired



2 Granville phillips 307 Vacuum Gauge Controller 307001


VAT 65040-PA52-ALV1?/0426 Pendulum valve for novellus


VAT 65040-PA52-ACB2?/0335, A-440873 Pendulum valve for n


VAT 65040-PA52-AVE1?/0001, A-1134532 Pendulum valve for


TWO Aera FC-7800CD, N2 100SCCM and Ar 50 SCCM


Asyst Hine Design Process Chamber Elevator 04290-201




STEC LF-310A-EVD,1 TEPO, 0.1 g/min lots of 4





2 National display system DM-X15/ZN, touch screen assy




LAM 715-018611-117 , LOWER, Electrode, 8" CHUCK




ENI AP-400BM1 Power Amplifer/Genera?tor AP-400




Novellus 02-283808 gas manifold assy w Brooks 5866RT MF


PFEIFFER VACUUM HPT 100, PT R34 330


4 STEC MFC SEC-4400M Cl2, HBr,


Iwaki Mag-Drive Pump CMD-280 Head (ft) 42, Capacity (GP


Iwaki Mag-Drive Pump CMD-199 1/3 HP, 60Hz, 3440 rpm


MKS 1651D Throttle valve controller 1651D-15445


MKS 1651D Throttle valve controller 1651D-23044


MKS 600 series pressure controller, Model # 651D-15414


MKS 600 series Throttle Valve controller, MKS 651D, Nov


Mavilor Spin motor BLS-072, 7.6 Peak torque, 1.9 st


4 AMAT 0050-80019 hose assembly, heat exchanger 75 feet


PFEIFFER Vacuum TCP 600 power supply balzers PM C01 320


MKS 653B-21801 Throttle valve, cal-weld, 10-160921-00/2


vacuum components, parts, valves lot's of 13


Novellus 02-267673-00 PVD preclean SIOC controller, po


AE RFPP LF-5 500 Watts RF Generator, AE 3150012


Adaptive pressure controller PM-5, 796-093088-004 L


Adaptive pressure controller PM-5,796-093088?-004 La


Adaptive pressure controller PM-5,796-093088?-004 La


Adaptive pressure controller PM-5,796-093088?-004 La


Adaptive pressure controller PM-5,796-093088?-004 RE


Bay Voltex  chiller MC075E2, 8160 BTU's


TWO Luxtron 100C M-100 Temperature Control 0190-35236





4 Inficon AG LI-9496 Balzers CDG045-SD, 100 m Torr 365-





40  Keyence Hybrid fiber optic sensor. FSV-V11P pri





JDSU 2214-20SLUP Laser and Power supply 2114P-20SLUP





CYBOR PUMP ConTROL MODULE MODEL 505E, 505C2





4 Unit MFC 1660, UFC-1660 BCl3 200 SCCM, N2 500 SCCM, C





ENI RF Generator LPG-6A , Low Frequency, , as is





LOT OF 8  Hewlett Packard TTL POD 15464-69601 PRICE





Unit 1660 MFC UFC-1660 Cl2 50 sccm, BCl3 20 sccm, N2 30





ALD HDSIOC 0 NOVELLUS 02-295367-00 VERSION 5.0 REV. A





MKS 649A11T11CAVR N2 10 SCCM, 10 torr, lot of 6




4 Brooks MFC 5866RT, Argon, 3 SLPM





Comdel CPS500AS RF Generator, AMAT 0190-13320





BROOKS Mass Flow Controller 5850 O2, N2, HCL, lots of 3





3 Unit 3000 Series DeviceNet UFC-3165, AMAT 3030-03330




Boc edwards D37209000 control pump


TDK-Lambda GENH750W Power Supply, Input Rating 100-240V


LSA CleanPart Ceramic Ring With Lining 4507346594


ENI Polara-260 Bipolar Pulsed Supply 0190-01428





2 Stec MFC SEC-4400MC, N2 200 SCCM, with calibration sh





2 Stec MFC SEC-4400MC, Ar 500 SCCM, with calibration sh





5 Edwards high vacuum INT, APG-M-NW25 ST/ST active pira





ISIOC RF HCM PVD-PVD RACK NOVELLUS 02-124572-00 REV. 1





ISIOC HCM APVD NOVELLUS 02-276954-00 REV. 1





ISIOC HI-LO TRANSFER NOVELLUS 02-131736-00 REV.A





SIOC WTS-HV SIOC 0 NOVELLUS 02-123962-00 REV. A





Lot of 2 Novellus 02-140949-00 REV C, Main system start





Lot of 2 MDC LAV-250-PAA 1MC, Vacuum Isolation valves,





AMAT 0010-30091 HV MODULE ESC, 5200 Centura Module assy





Novellus 27-163237-00 controller, Trust automation TA20





Merlin engineering works, VCF PWA 4586, FAB 4585 B, ME1





AMAT 0100-A1211 CVC3 board





Perkin Elmer 859-0742-001 AFA PCB module, SVG ADSP-





NRC diffusion pump 0162-2. J-101





Varian Diffusion pump 85826-316, VHS-6, 208 volts





AMAT 0100-A2151 DAS-200, ME-S-8986 94V04907 batch numbe





AMAT 0040-09212 Wafer lift ceramic assembly, P5000 CVD





Digital dynamic I/O controller 27-10157-00 novellus





Lot of 3 Novellus 16-274114-00 Vacuum Bellows Assembly





2  Stec SEC-4400 MFC, SEC-4400M, WF6 gas, 10 SCCM fl





MKS 600 series pressure controller 65D2B





air bearing Spindle Federal mogul Westwind. 1073-69




2 MFC N2 20 SLM Press CTL (Bronkhorst)





Vat Series 61236-PAGG-0003?/0006 Butterfly valve con





7 MKS baratron 22-25603, 2.5 Inch H2O Range, S05601





Spellman High Voltage Electronics X2784, Model ESC1.5PN





PCB RS232 Eight Port with cables





ALCATEL DML-3X50 694-7600-001, DL MULDEM SHELF





3 MKS baratron 124A-11848, 2000 Torr Range, with calibr





2  AMAT 0090-70008 Motor assy cassette handler in OE





lot of 2 Tylan general MDVX-100B motor driven throttle





Ferrofluidic feedthrough FTH-0009-A 508332-000





NOVELLUS 27-156710-00 ConTROLLER I/O DUALCAP VERS. 4.8






15  Honeywell 27-104612-00 Display digital 4-20 MA